RAS PhysicsРадиотехника и электроника Journal of Communications Technology and Electronics

  • ISSN (Print) 0033-8494
  • ISSN (Online) 3034-5901

Effect of additional dielectric layer and grounded shield on rf characteristics of GaAs microwave monolithic integrated circuit elements in 3D-integrated modules

PII
S0033849425010043-1
DOI
10.31857/S0033849425010043
Publication type
Article
Status
Published
Authors
Volume/ Edition
Volume 70 / Issue number 1
Pages
27-36
Abstract
The effect of coating GaAs monolithic integrated circuit with a benzocyclobutene dielectric layer and grounded copper shield is investigated. Using electromagnetic simulation up to 40 GHz, changes of RF characteristics of microstrip and coplanar transmission lines, a Marshand balun, and a bandpass filter due to coating are demonstrated. It is shown that from the performance variation viewpoint, the application of lines is preferred in GaAs monolithic integrated circuits used in 3D-integrated modules with such the coating.
Keywords
МИС интерпозер микрополосковая линия копланарная линия симметрирующий трансформатор интегрированный модуль бензоциклобутен
Date of publication
16.09.2025
Year of publication
2025
Number of purchasers
0
Views
15

References

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