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RAS PhysicsРадиотехника и электроника Journal of Communications Technology and Electronics

  • ISSN (Print) 0033-8494
  • ISSN (Online) 3034-5901

On iron-doped diamond-like films produced in a hollow cathode discharge

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PII
10.31857/S0033849424100099-1
DOI
10.31857/S0033849424100099
Publication type
Article
Status
Published
Authors
I. A. Sorokin
  • Affiliation:
    Fryazino Branch Kotelnikov Institute of Radioengineering and Electronics of RAS
    National Research Nuclear University MEPhI
Volume/ Edition
Volume 69 / Issue number 10
Pages
996-999
Abstract
The paper presents the results of measuring the current-voltage characteristics of iron-doped diamond-like films obtained by a combined method of physical sputtering of an iron cathode and plasma-chemical deposition in a hollow-cathode discharge. The nonlinear nature of the transverse conductivity of the film and a significant influence of the amplitude value of the sweep voltage on the amplitude value of the current and the shape of the current-voltage characteristic were shown.
Keywords
алмазоподобный углерод плазмохимическое осаждение разряд с полым катодом тонкая пленка нелинейная вольт-амперная характеристика электропроводность
Date of publication
16.09.2025
Year of publication
2025
Number of purchasers
0
Views
15

References

  1. 1. Сорокин И.А., Колодко Д.В., Краснобаев К.И. // РЭ. 2020. Т.65. №3. С.288.
  2. 2. Sorokin I.A., Kolodko D.V. // Vacuum. 2023. V. 207. Article No. 111570.
  3. 3. Vedeneev A. S., Luzanov V. A., Rylkov V. V. // Semiconductors. 2019. V. 53. № 14. P. 1970.
  4. 4. Николаев С.Н., Веденеев А.С., Лузанов В.А. и др. // РЭ. 2021. Т. 66. № 10. С. 1024.
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