- PII
- 10.31857/S0033849423100078-1
- DOI
- 10.31857/S0033849423100078
- Publication type
- Status
- Published
- Authors
- Volume/ Edition
- Volume 68 / Issue number 10
- Pages
- 1040-1042
- Abstract
- A group of high-energy positive O^+ ions was detected in a plasma flow high-current pulsed magnetron discharge with a hot target in an Ar/O_2 gas mixture. The mechanism for the formation of accelerated O^+ ions may be the conversion of accelerated ones in the cathode layer of negative ions O^– → O^+ in the processes of charge exchange or ionization by electron impact.
- Keywords
- plasma flow high-current pulsed magnetron discharge electron impact
- Date of publication
- 01.10.2023
- Year of publication
- 2023
- Number of purchasers
- 0
- Views
- 50
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