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RAS PhysicsРадиотехника и электроника Journal of Communications Technology and Electronics

  • ISSN (Print) 0033-8494
  • ISSN (Online) 3034-5901

Preparation of Single-Crystal Zinc Oxide Films on a Metal Sublayer

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PII
10.31857/S0033849423050108-1
DOI
10.31857/S0033849423050108
Publication type
Status
Published
Authors
V. A. Luzanov
  • Affiliation: Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch
Volume/ Edition
Volume 68 / Issue number 5
Pages
470-471
Abstract
To increase the efficiency of devices based on piezoelectric transducers made of zinc oxide, it is proposed to use single-crystal layers of platinum as the bottom electrode. Epitaxial single-crystal films of zinc oxide on metal have been obtained. It is shown that this combination of layers makes it possible to minimizethe mismatch in the lattice parameters of the film and substrate, which significantly improves the quality of the obtained piezoelectric film.
Keywords
piezoelectric transducer zinc oxide epitaxial single-crystal film
Date of publication
16.09.2025
Year of publication
2025
Number of purchasers
0
Views
14

References

  1. 1. Лузанов В.А., Алексеев С.Г., Ползикова Н.И. // РЭ. 2018. Т. 63. № 9. С. 1015.
  2. 2. Morales C., Leinen D., del Campo A. et al. // J. Alloys and Compounds. 2021. V. 884. Article No. 161056.
  3. 3. Franklin J.B., Zou B., Petrov P. et al. // J. Material Chemistry. 2021. V. 21. № 22. P. 8178.
  4. 4. Steiger P., Zhang J., Harrabi K. et al. // Thin Solid Films. 2018. V. 645. P. 417.
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